Suspension Vibration Compensation Using a Mems Microactuator in Hard Disk Drives
نویسندگان
چکیده
This paper discusses the design and fabrication of a prototype MEMS microactuator and vibration sensors, and controller design for suspension vibration compensation in disk drives. The microactuator utilizes parallel-plates actuation and comb-finger position sensing. An electrical isolation MEMS fabrication technique is utilized to increase the actuation force. An LQG method is proposed for vibration sensor location and orientation optimization. Strain sensors are fabricated by depositing polysilicon on a metal wafter. A vibration control scheme using adaptive feedforward control is formulated to cancel suspension vibration using the microactuator.
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